Abstract: The deuterium absorption of titanium film with surface oxide layer is carried out by measuring the parameter of thermodynamics and kinetics of metal hydride under the constant and various temperature, respectively. The experimental results show that the thicker the oxide layer, the slower the ratio of deuterium absorption, the longer the equilibrium time of deuterium absorption in the constant and the temperature of deuterium absorption elevates with increase in the thickness of oxide layer under the same rate of temperature-elevating and initial pressure of deuterium. It indicats that the oxide layers of titanium film surface possess the blocking property of deuterium diffusion.