基于半导体工艺与器件(TCAD)仿真方法的DIS剂量计研究

Research on DIS Dosimeter Based on TCAD Simulation Method

  • 摘要: 核电站反应堆运行、核医疗等场所常利用热释光剂量计等开展个人剂量监测、环境辐射监测,但传统热释光剂量计等设备存在实时性、读出便利性方面的不足。针对环境与个人剂量监测需求,本研究对一种新型的直接离子存储式(direct ion storage, DIS)剂量计进行模拟研究与实验测试。通过蒙特卡罗仿真、半导体工艺与器件仿真(TCAD)搭建起完整的仿真模型,结合现有剂量计在辐射场中进行剂量率学特性测试。建立DIS探测器通用仿真模型,完成整体结构参数设计,建立辐射剂量与漏极电流间的定量关系,并根据模拟结果采用1.6 mm PMMA或1 mm铝对现有剂量计进行补偿优化,使测试范围内能量响应由±30%降至±20%以内。本结果为DIS剂量计的进一步的研制提供理论与技术支持,对新型DIS探测器的研究和应用提供参考。

     

    Abstract: Personal dose monitoring and environmental radiation monitoring are commonly conducted in places such as nuclear power plant reactor operations and nuclear medical facilities, often using thermoluminescent dosimeters (TLD). However, conventional devices like TLDs suffer from limitations in terms of real-time capability and readout convenience. To address the requirements of environmental and personal dose monitoring, this study carries out simulation research and experimental testing on a novel type of direct ion storage (DIS) dosimeter. A comprehensive simulation model is established through Monte Carlo simulations and technology computer-aided design (TCAD) for semiconductor process and device simulation. Combined with existing dosimeters, dosimetric characteristic tests are performed in radiation fields. As a result, a general simulation model for the DIS detector is developed, the overall structural parameters are designed, and a quantitative relationship between radiation dose and drain current is established. Based on the simulation results, compensation optimization of the existing dosimeter is performed using 1.6 mm PMMA or 1 mm aluminum, improving the energy response within the test range from ±30% to within ±20%. This study provides theoretical and technical support for further development of DIS dosimeters and serves as a reference for the research and application of novel DIS detectors.

     

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