Abstract: ⁶⁸Ga is one of the most clinically valuable metal positron isotopes. Producing ⁶⁸Ga through a ⁶⁸Ge/⁶⁸Ga generator is a relatively convenient way, while the parent nuclide ⁶⁸Ge is mainly produced by cyclotrons. One of the most commonly used production methods is to obtain ⁶⁸Ge through proton irradiation of Ga-Ni alloy targets. Accurately simulating the ⁶⁸Ge yield is of great significance for Ga-Ni alloy target preparation, cyclotron irradiation plan making and production preparation. This paper proposes a method for calculating the theoretical yield of ⁶⁸Ge produced by cyclotrons based on the Monte Carlo method. The energy loss and ⁶⁸Ge theoretical yield of proton beam bombardment of Ga-Ni alloy targets under different conditions are calculated. The relevant results can provide reference for Ga-Ni alloy thickness design under different energy proton beam irradiation conditions. The experimental results match well with the calculated results. Finally, the reliability of the calculation results was verified through the cyclotron irradiation experiment, indicating that the theoretical calculation is instructive to the experimental results.