中子深度分析技术的反演迭代计算

Inverse Iteration Algorithm for Neutron Depth Profiling

摘要: 针对中子深度剖面分析（NDP），采用蒙特卡罗模拟和概率迭代反演方法计算了硼在硅基底样品内的深度分布。结合CARR堆NDP实验装置，利用MCNP和Geant4软件模拟了标准样品SRM2137中硼元素的能谱图，通过MATLAB软件反演迭代推算解析出了标准样品中元素对应的浓度深度变化图。经验证，反演迭代计算方法适用于NDP系统。

Abstract: Based on the method of Monte Carlo simulation and probabilistic inversion for neutron depth profiling, the depth concentration distribution of element B in Si matrix material was calculated. According to NDP experimental equipment at CARR, energy spectra of standard sample SRM2137 were simulated by using MCNP and Geant4 software, and the concentration-depth diagram of elements in SRM2137 was achieved adopting inverse iteration method through MATLAB software. It showed that the inverse iteration calculation in NDP was feasible.