Abstract: With GeF₄ as a process gas, the Germanium isotopes were separated by a single centrifugal experiment of domestic centrifuge through the gas centrifuge process. Additionally, the overall separation factor(＞1.40) was preliminarily achieved in the experiment with different feed flow and split ratio. The production of ⁷⁶GeF₄ with rich abundance after 1-2-1 cascading experiment and relevant calculation were also set forth. Therefore, the production of ⁷⁶GeF₄ with rich abundance is obtainable in the Germanium isotopes centrifugal separation with GeF₄ as a process gas.