Abstract: He cleanup methods using uranium bed and active carbon absorption and then using hydrogen isotope dilution to elimination trace tritium are introduced. The results show that both U bed and active carbon absorption column are effective in 3He extraction. 3He gas with purity 99.99% is obtained using these methods and 3H mole fraction in 3He is reduced dowm to 3.5×10 -10 % using hydrogen isotope dilution. Comparing with the other methods, the U bed and hydrogen isotope dilution methods are more effective and simple in 3He cleanup and trace tritium elimination.