Abstract: This paper simply describes a new module of XFR coating thickness gauge for small area.An X-ray generator emits radiation with much higher intensity and broader energy region than that from radioisotope sources often used in previous modules. The area of measurement is as small as less than 0.5mm in diameter, and it is able to determine the thickness of different elements from single layers, multiplex layers, and alloy layers. The results are treated by a computer and printed on paper.